X-RAY-DIFFRACTION TOPOGRAPHS OF SILICON CRYSTALS WITH SUPERPOSED OXIDE FILM .2. PENDELLOSUNG FRINGES - COMPARISON OF EXPERIMENT WITH THEORY

被引:58
作者
PATEL, JR
KATO, N
机构
[1] BELL TEL LABS,MURRAY HILL,NJ 07974
[2] NAGOYA UNIV,FAC ENGN,DEPT APPL PHYS,NAGOYA,JAPAN
关键词
D O I
10.1063/1.1662380
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:971 / 977
页数:7
相关论文
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