CONDUCTANCE MODULATION METHOD FOR THE MEASUREMENT OF THE PUMPING SPEED AND OUTGASSING RATE OF PUMPS IN ULTRAHIGH-VACUUM

被引：27

作者：

TERADA, K ^{[1
]}

OKANO, T ^{[1
]}

TUZI, Y ^{[1
]}

机构：

[1] ULVAC CORP,CHIGASAKI,KANAGAWA 253,JAPAN

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期

关键词：

D O I：

10.1116/1.575907

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2397 / 2402

页数：6

共 9 条

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[8] THE PUMPING OF GASES DESORBED BY PULSED RUBY-LASER IRRADIATION OF A SI(111) SURFACE [J].

TERADA, K ;

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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04) :2507-2511

[9] OUTGASSING CHARACTERISTICS OF STAINLESS STEEL AND ALUMINUM WITH DIFFERENT SURFACE TREATMENTS [J].

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