SOME EXPERIMENTAL ASPECTS OF DC REACTIVE SPUTTERING

被引：16

作者：

HECQ, M

HECQ, A

LIEMANS, M

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1978年 / 49卷 / 12期

关键词：

D O I：

10.1063/1.324546

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：6176 / 6178

页数：3

共 15 条

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[8] NUCLEATION AND GROWTH OF COBALT FILMS ON NACL .1. EFFECTS OF EVAPORATION RATE AND SURFACE MORPHOLOGY [J].

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[10]

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