INTERACTION OF O-2,CO,H2O,H-2 AND N-2 WITH THIN CHROMIUM FILMS STUDIED BY INTERNAL-STRESS MEASUREMENTS

被引：20

作者：

MARTINZ, HP

ABERMANN, R

机构：

来源：

THIN SOLID FILMS | 1982年 / 89卷 / 02期

关键词：

D O I：

10.1016/0040-6090(82)90440-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：133 / 138

页数：6

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