GOLD SOLUBILITY IN SILICON AND GETTERING BY PHOSPHORUS

[11] DIFFUSION GETTERING OF AU AND CU IN SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (06) : 786 - 796

[12] PERDIJK HJR, 1967, NUOVO CIMENTO, V5, P73

[13] Seitz F., 1940, MODERN THEORY SOLIDS

[14] SOLID SOLUBILITIES OF IMPURITY ELEMENTS IN GERMANIUM AND SILICON [J]. BELL SYSTEM TECHNICAL JOURNAL, 1960, 39 (01): : 205 - 233

[15] WANG S, 1966, SOLID STATE ELECTRON

[16] GOLD IN SILICON - EFFECT ON RESISTIVITY AND DIFFUSION IN HEAVILY-DOPED LAYERS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1964, 111 (12) : 1377 - 1380

[17] Wolf H. F, 1969, SILICON SEMICONDUCTO

[18] EXCESS VACANCY GENERATION MECHANISM AT PHOSPHORUS DIFFUSION INTO SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1974, 45 (04) : 1498 - 1506

[19] [No title captured]

[11] DIFFUSION GETTERING OF AU AND CU IN SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (06) : 786 - 796

[12] PERDIJK HJR, 1967, NUOVO CIMENTO, V5, P73

[13] Seitz F., 1940, MODERN THEORY SOLIDS

[14] SOLID SOLUBILITIES OF IMPURITY ELEMENTS IN GERMANIUM AND SILICON [J]. BELL SYSTEM TECHNICAL JOURNAL, 1960, 39 (01): : 205 - 233

[15] WANG S, 1966, SOLID STATE ELECTRON

[16] GOLD IN SILICON - EFFECT ON RESISTIVITY AND DIFFUSION IN HEAVILY-DOPED LAYERS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1964, 111 (12) : 1377 - 1380

[17] Wolf H. F, 1969, SILICON SEMICONDUCTO

[18] EXCESS VACANCY GENERATION MECHANISM AT PHOSPHORUS DIFFUSION INTO SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1974, 45 (04) : 1498 - 1506

[19] [No title captured]