DIFFUSION GETTERING OF AU AND CU IN SILICON

被引：46

作者：

MEEK, RL ^{[1
]}

SEIDEL, TE ^{[1
]}

CULLIS, AG ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1975年 / 122卷 / 06期

关键词：

D O I：

10.1149/1.2134324

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

收藏

页码：786 / 796

页数：11

相关论文

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