OPTICAL-PROPERTIES OF TANTALUM PENTOXIDE COATINGS DEPOSITED USING ION-BEAM PROCESSES

被引：27

作者：

ALJUMAILY, GA ^{[1
]}

EDLOU, SM ^{[1
]}

机构：

[1] BARR ASSOCIATES INC,WESTFORD,MA 01886

来源：

THIN SOLID FILMS | 1992年 / 209卷 / 02期

关键词：

D O I：

10.1016/0040-6090(92)90679-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Optical properties and environmental stability of tantalum pentoxide coatings have been examined. Coatings are deposited using thermal evaporation, ion-assisted deposition and reactive d.c. sputtering. Coatings deposited using ion beam processes are stable with much improved optical properties compared with conventionally evaporated coatings.

引用

页码：223 / 229

页数：7

共 14 条

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