INFLUENCE OF ION-BOMBARDMENT ON THE INTERACTION OF SB WITH THE SI(100) SURFACE

被引：6

作者：

BARNETT, SA

WINTERS, HF

GREENE, JE

机构：

[1] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801

[2] IBM,ALMADEN RES CTR,SAN JOSE,CA 95120

来源：

SURFACE SCIENCE | 1987年 / 181卷 / 03期

关键词：

D O I：

10.1016/0039-6028(87)90208-1

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：596 / 603

页数：8

共 18 条

[11] FEATURES OF THE INITIAL GROWTH OF GOLD-FILMS DEPOSITED ON ROCK-SALT SUBSTRATES BY ION-BEAM SPUTTERING [J].

LANE, GE ;

ANDERSON, JC .

THIN SOLID FILMS, 1979, 57 (02) :277-283

[12] NUCLEATION AND INITIAL GROWTH OF GOLD-FILMS DEPOSITED ONTO SODIUM-CHLORIDE BY ION-BEAM SPUTTERING [J].

LANE, GE ;

ANDERSON, JC .

THIN SOLID FILMS, 1975, 26 (01) :5-23

[13] SIMULTANEOUS RHEED-AES-QMS STUDY ON EPITAXIAL SI FILM GROWTH ON SI(111) AND SAPPHIRE (-1102) SURFACES BY PARTIALLY IONIZED VAPOR-DEPOSITION [J].

NARUSAWA, T ;

SHIMIZU, S ;

KOMIYA, S .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02) :366-368

[14]

Redhead P. A., 1962, VACUUM, V12, P203

[15] EFFECTS OF GA AND SI IONIZATION ON THE GROWTH OF GA DOPED SI MBE [J].

SHIMIZU, S ;

KOMIYA, S .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (03) :765-768

[16] THEORY OF SPUTTERING .I. SPUTTERING YIELD OF AMORPHOUS AND POLYCRYSTALLINE TARGETS [J].

SIGMUND, P .

PHYSICAL REVIEW, 1969, 184 (02) :383-+

[17] RF INDUCTION TECHNIQUE FOR SAMPLE HEATING IN SURFACE SCIENCE EXPERIMENTS [J].

WINTERS, HF ;

SCHLAEGEL, J ;

HORNE, D .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (04) :1605-1608

[18] SPUTTERING OF CHEMISORBED GAS (NITROGEN ON TUNGSTEN) BY LOW-ENERGY IONS [J].

WINTERS, HF ;

SIGMUND, P .

JOURNAL OF APPLIED PHYSICS, 1974, 45 (11) :4760-4766

← 1 2 →