BUCKLING OF THERMALLY-GROWN SIO2 THIN-FILMS

被引:17
作者
WILMSEN, CW
THOMPSON, EG
MEISSNER, GH
机构
关键词
D O I
10.1109/T-ED.1972.17381
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:122 / +
页数:1
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