INTERFACE IMAGING BY SCANNING INTERNAL PHOTOEMISSION

被引:22
作者
DISTEFANO, TH [1 ]
VIGGIANO, JM [1 ]
机构
[1] IBM CORP, THOMAS J WATSON RES CTR, PHYS SCI DEPT, YORKTOWN HEIGHTS, NY 10598 USA
关键词
D O I
10.1147/rd.182.0094
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
引用
收藏
页码:94 / 99
页数:6
相关论文
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