ARSENIC SEGREGATION IN POLYCRYSTALLINE SILICON

被引：23

作者：

MANDURAH, MM ^{[1
]}

SARASWAT, KC ^{[1
]}

KAMINS, TI ^{[1
]}

机构：

[1] HEWLETT PACKARD CO,PALO ALTO,CA 94304

来源：

APPLIED PHYSICS LETTERS | 1980年 / 36卷 / 08期

关键词：

D O I：

10.1063/1.91623

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：683 / 685

页数：3

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