ORIGIN OF THE SHEAR PIEZORESISTANCE COEFFICIENT-PI-44 OF N-TYPE SILICON

被引:39
作者
KANDA, Y [1 ]
SUZUKI, K [1 ]
机构
[1] TOKYO METROPOLITAN INST TECHNOL, HINO, TOKYO 191, JAPAN
关键词
D O I
10.1103/PhysRevB.43.6754
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
It is shown that the origin of the shear piezoresistance (PR) coefficient pi-44 of n-type silicon is a stress-induced effective-mass change of individual valleys rather than the stress-induced intervalley electron transfer, which has long been believed to be the dominant source of PR in many-valley semiconductors. An orthorhomic stress destorys the rotational symmetry of the ellipsoidal valleys and induces large effective-mass changes due to the special character of the conduction-band edge of silicon. The effective-mass anisotropy then leads to a transverse voltage when the current is along [100]. This mechanism predicts a sign and a magnitude of pi-44 for n-type Si that are consistent with experiments hitherto known.
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页码:6754 / 6756
页数:3
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