CRYSTALLINE TO AMORPHOUS TRANSFORMATION IN NIAL - ION IRRADIATION STUDIES IN RELATION TO CASCADE PARAMETERS

被引:33
作者
JAOUEN, C
DELAFOND, J
RIVIERE, JP
机构
来源
JOURNAL OF PHYSICS F-METAL PHYSICS | 1987年 / 17卷 / 02期
关键词
D O I
10.1088/0305-4608/17/2/005
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:335 / 350
页数:16
相关论文
共 53 条
[41]  
SEITZ F, 1956, SOLID STATE PHYS, V2, P327
[42]  
Sigmund P., 1981, Sputtering by particle bombardment I. Physical sputtering of single-element solids, P9
[43]  
Sigmund P., 1968, P INT C SOLID STATE, P374
[44]  
SIGMUND P., 1969, RADIAT EFF, V1, P15, DOI https://doi.org/10.1080/00337576908234453
[45]   A COMPREHENSIVE STUDY OF DEFECT PRODUCTION AND ANNEALING IN ION-IMPLANTED INP [J].
SLATER, M ;
KOSTIC, S ;
NOBES, MJ ;
CARTER, G .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :429-432
[46]  
Swanson M. L., 1971, Radiation Effects, V9, P249, DOI 10.1080/00337577108231056
[47]  
THOME L, 1986, IN PRESS NUCL INST B
[48]   ENERGY SPIKES IN SI AND GE DUE TO HEAVY-ION BOMBARDMENT [J].
THOMPSON, DA ;
WALKER, RS .
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1978, 36 (1-2) :91-100
[49]   DISORDER PRODUCTION AND AMORPHIZATION IN ION-IMPLANTED SILICON [J].
THOMPSON, DA ;
GOLANSKI, A ;
HAUGEN, KH ;
STEVANOVIC, DV ;
CARTER, G ;
CHRISTODOULIDES, CE .
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1980, 52 (1-2) :69-84
[50]   AMORPHIZATION OF HF-NI FILMS BY SOLID-STATE REACTION [J].
VANROSSUM, M ;
NICOLET, MA ;
JOHNSON, WL .
PHYSICAL REVIEW B, 1984, 29 (10) :5498-5503