ION-CHAIN INTERACTION IN KEV ION-BEAM-IRRADIATED POLYSTYRENE

被引:39
作者
CALCAGNO, L [1 ]
FOTI, G [1 ]
LICCIARDELLO, A [1 ]
PUGLISI, O [1 ]
机构
[1] UNIV CATANIA,DIPARTIMENTO SCI CHIM,I-95100 CATANIA,ITALY
关键词
D O I
10.1063/1.98797
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:907 / 909
页数:3
相关论文
共 11 条
[1]   ION-BOMBARDMENT OF RESISTS [J].
ADESIDA, I .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY) :79-86
[2]   RESIST EXPOSURE WITH LIGHT-IONS [J].
ADESIDA, I ;
ANDERSON, C ;
WOLF, ED .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04) :1182-1185
[3]  
DOLE M, 1973, RAD CHEM MACROMOLECU, V1, P223
[4]  
DOLE M, 1973, RAD CHEM MACROMOLECU, V2, P57
[5]   Constitution of three-dimensional polymers and the theory of gelation [J].
Flory, PJ .
JOURNAL OF PHYSICAL CHEMISTRY, 1942, 46 (01) :132-140
[6]   ION-BEAM EXPOSURE CHARACTERISTICS OF RESISTS [J].
HALL, TM ;
WAGNER, A ;
THOMPSON, LF .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06) :1889-1892
[7]   PRIMARY CHEMICAL EVENTS IN ION BOMBARDED POLYSTYRENE FILMS - AN INFRARED STUDY [J].
PUGLISI, O ;
LICCIARDELLO, A ;
PIGNATARO, S ;
CALCAGNO, L ;
FOTI, G .
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1986, 98 (1-4) :161-170
[8]  
PUGLISI O, 1987, NUCL INSTRUM METHO B, V19, P255
[9]   ION-BEAM SENSITIVITY OF POLYMER RESISTS [J].
RYSSEL, H ;
HABERGER, K ;
KRANZ, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04) :1358-1362