PREPARATION OF GLOW-DISCHARGE AMORPHOUS-SILICON FOR PASSIVATION LAYERS

被引：15

作者：

WEITZEL, I

PRIMIG, R

KEMPTER, K

机构：

来源：

THIN SOLID FILMS | 1981年 / 75卷 / 02期

关键词：

D O I：

10.1016/0040-6090(81)90450-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：143 / 150

页数：8

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