INVERSION-LAYERS ON GERMANIUM WITH LOW-TEMPERATURE-DEPOSITED ALUMINUM-PHOSPHORUS OXIDE DIELECTRIC FILMS

被引：10

作者：

CHANG, RPH ^{[1
]}

FIORY, AT ^{[1
]}

机构：

[1] AT&T BELL LABS,MURRAY HILL,NJ 07974

来源：

APPLIED PHYSICS LETTERS | 1986年 / 49卷 / 22期

关键词：

D O I：

10.1063/1.97273

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1534 / 1536

页数：3

共 20 条

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