DIFFUSION OF GROUP-V IMPURITY IN SILICON

被引：40

作者：

YOSHIDA, M

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1971年 / 10卷 / 06期

关键词：

D O I：

10.1143/JJAP.10.702

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：702 / &

共 23 条

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