SOME FEATURES OF MAGNETRON SPUTTERING

[1] Bickley WP, 1962, VIDE, V99, P214

[2] CHAPIN JS, 1974, RES DEV, V25, P37

[3] CHOPRA KL, 1969, THIN FILM PHENOMENA, P222

[4] Francis G., 1960, IONIZATION PHENOMENA, P124

[5] EFFICIENT LOW PRESSURE SPUTTERING IN A LARGE INVERTED MAGNETRON SUITABLE FOR FILM SYNTHESIS [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1965, 36 (03) : 277 - &

[6] BISTABLE SWITCHING OF ZNO THIN FILM DIODES [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1971, 10 (04) : 521 - &

[7] STRUCTURES AND ELECTRICAL PROPERTIES OF ZINC OXIDE FILMS PREPARED BY LOW PRESSURE SPUTTERING SYSTEM [J]. THIN SOLID FILMS, 1971, 7 (02) : 135 - &

[8] A CURRENT INSTABILITY IN TIO2 THIN FILM [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1970, 9 (09) : 1078 - +

[9] ELECTRICAL PROPERTIES OF MIXED OXIDE FILM OF PBO AND TIO2 [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1968, 7 (04) : 437 - &

[10] Penning F.M., 1939, US Patent, Patent No. [2,146,025, 2146025]

[1] Bickley WP, 1962, VIDE, V99, P214

[2] CHAPIN JS, 1974, RES DEV, V25, P37

[3] CHOPRA KL, 1969, THIN FILM PHENOMENA, P222

[4] Francis G., 1960, IONIZATION PHENOMENA, P124

[5] EFFICIENT LOW PRESSURE SPUTTERING IN A LARGE INVERTED MAGNETRON SUITABLE FOR FILM SYNTHESIS [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1965, 36 (03) : 277 - &

[6] BISTABLE SWITCHING OF ZNO THIN FILM DIODES [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1971, 10 (04) : 521 - &

[7] STRUCTURES AND ELECTRICAL PROPERTIES OF ZINC OXIDE FILMS PREPARED BY LOW PRESSURE SPUTTERING SYSTEM [J]. THIN SOLID FILMS, 1971, 7 (02) : 135 - &

[8] A CURRENT INSTABILITY IN TIO2 THIN FILM [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1970, 9 (09) : 1078 - +

[9] ELECTRICAL PROPERTIES OF MIXED OXIDE FILM OF PBO AND TIO2 [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1968, 7 (04) : 437 - &

[10] Penning F.M., 1939, US Patent, Patent No. [2,146,025, 2146025]