PLASMA DEPOSITION OF ALUMINUM-OXIDE FILMS

被引：34

作者：

CATHERINE, Y

TALEBIAN, A

机构：

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1988年 / 17卷 / 02期

关键词：

D O I：

10.1007/BF02652142

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

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页码：127 / 134

页数：8

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