UNIFIED DEFECT MODEL AND BEYOND

被引:697
作者
SPICER, WE
LINDAU, I
SKEATH, P
SU, CY
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1980年 / 17卷 / 05期
关键词
D O I
10.1116/1.570583
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1019 / 1027
页数:9
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