NANOMETER-SCALE LITHOGRAPHY USING THE ATOMIC FORCE MICROSCOPE

被引:170
作者
MAJUMDAR, A
ODEN, PI
CARREJO, JP
NAGAHARA, LA
GRAHAM, JJ
ALEXANDER, J
机构
[1] ARIZONA STATE UNIV, DEPT MECH & AEROSP ENGN, TEMPE, AZ 85287 USA
[2] ARIZONA STATE UNIV, DEPT PHYS, TEMPE, AZ 85287 USA
[3] MOTOROLA INC, ADV TECHNOL LAB, MESA, AZ 85202 USA
[4] UNIV TOKYO, DEPT SYNTHET CHEM, BUNKYO KU, TOKYO 113, JAPAN
[5] PARK SCI INSTRUMENTS, SUNNYVALE, CA 94089 USA
关键词
D O I
10.1063/1.108268
中图分类号
O59 [应用物理学];
学科分类号
摘要
We demonstrate a new use of the atomic force microscope (AFM) for nanometer-scale lithography on ultrathin films of poly (methylmethacrylate) (PMMA). The PMMA films were chemically modified as both positive and negative resists due to energy transfer from a highly localized electron source provided by metallized AFM tips. We were able to fabricate a line pattern with 68 nm line periodicity with about 35 nm line widths.
引用
收藏
页码:2293 / 2295
页数:3
相关论文
共 28 条
  • [1] SURFACE MODIFICATION WITH THE SCANNING TUNNELING MICROSCOPE
    ABRAHAM, DW
    MAMIN, HJ
    GANZ, E
    CLARKE, J
    [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1986, 30 (05) : 492 - 499
  • [2] ATOMIC RESOLUTION IMAGING OF A NONCONDUCTOR BY ATOMIC FORCE MICROSCOPY
    ALBRECHT, TR
    QUATE, CF
    [J]. JOURNAL OF APPLIED PHYSICS, 1987, 62 (07) : 2599 - 2602
  • [3] NANOSTRUCTURE FABRICATION BY SCANNING TUNNELING MICROSCOPE
    BABA, M
    MATSUI, S
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1990, 29 (12): : 2854 - 2857
  • [4] ATOMIC FORCE MICROSCOPE
    BINNIG, G
    QUATE, CF
    GERBER, C
    [J]. PHYSICAL REVIEW LETTERS, 1986, 56 (09) : 930 - 933
  • [5] SURFACE STUDIES BY SCANNING TUNNELING MICROSCOPY
    BINNING, G
    ROHRER, H
    GERBER, C
    WEIBEL, E
    [J]. PHYSICAL REVIEW LETTERS, 1982, 49 (01) : 57 - 61
  • [6] NANOSTRUCTURE TECHNOLOGY
    CHANG, THP
    KERN, DP
    KRATSCHMER, E
    LEE, KY
    LUHN, HE
    MCCORD, MA
    RISHTON, SA
    VLADIMIRSKY, Y
    [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1988, 32 (04) : 462 - 493
  • [7] SUB-30-NM LITHOGRAPHY IN A NEGATIVE ELECTRON-BEAM RESIST WITH A VACUUM SCANNING TUNNELING MICROSCOPE
    DOBISZ, EA
    MARRIAN, CRK
    [J]. APPLIED PHYSICS LETTERS, 1991, 58 (22) : 2526 - 2528
  • [8] DIRECT MEASUREMENT OF COLLOIDAL FORCES USING AN ATOMIC FORCE MICROSCOPE
    DUCKER, WA
    SENDEN, TJ
    PASHLEY, RM
    [J]. NATURE, 1991, 353 (6341) : 239 - 241
  • [9] POSITIONING SINGLE ATOMS WITH A SCANNING TUNNELING MICROSCOPE
    EIGLER, DM
    SCHWEIZER, EK
    [J]. NATURE, 1990, 344 (6266) : 524 - 526
  • [10] ATOMISTIC MECHANISMS AND DYNAMICS OF ADHESION, NANOINDENTATION, AND FRACTURE
    LANDMAN, U
    LUEDTKE, WD
    BURNHAM, NA
    COLTON, RJ
    [J]. SCIENCE, 1990, 248 (4954) : 454 - 461