QUALITATIVE-ANALYSIS OF THIN GALLIUM NITRIDE FILMS WITH SECONDARY ION MASS-SPECTROMETRY

被引：2

作者：

ANDREWS, JE ^{[1
]}

DUHAMEL, AP ^{[1
]}

LITTLEJOHN, MA ^{[1
]}

机构：

[1] N CAROLINA STATE UNIV,DEPT ELECT ENGN,RALEIGH,NC 27607

来源：

ANALYTICAL CHEMISTRY | 1977年 / 49卷 / 11期

关键词：

D O I：

10.1021/ac50019a018

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：1536 / 1540

页数：5

共 9 条

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IIEGEMS M, 1972, J APPL PHYS, V43, P3797

[8]

KARASEK FW, 1973, RES DEV, V24, P40

[9] SPACE-CHARGE-LIMITED CURRENT FLOW IN GALLIUM NITRIDE THIN-FILMS [J].

VESELY, JC ;

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PHYSICAL REVIEW B, 1974, 10 (02) :582-590

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