IRON NITRIDE THIN-FILMS WITH HIGH COERCIVITY AND GOOD CORROSION-RESISTANCE

被引：46

作者：

KUME, M ^{[1
]}

TSUJIOKA, T ^{[1
]}

MATSUURA, K ^{[1
]}

ABE, Y ^{[1
]}

TASAKI, A ^{[1
]}

机构：

[1] UNIV TSUKUBA,INST APPL PHYS,SAKURA,IBARAKI 305,JAPAN

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1987年 / 23卷 / 05期

关键词：

HIGHY-DENSITY MAGNETIC RECORDING - ION-ASSISTANT VAPOR DEPOSITION (IVD) - IRON NITRIDE THIN FILMS;

D O I：

10.1109/TMAG.1987.1065217

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Iron nitride (FeN) thin films prepared by an Ion-assisted Vapor Deposition method have been characterized by magnetic properties and corrosion resistance. Magnetic properties are strongly dependent on the nitrogen concentration and on the minimum incidence angle of deposited iron particles. As a result of corrosion tests, FeN films exhibit superior corrosion resistance to that of Fe film. Consequently, with respect to these points of view, FeN films are suitable for high-density magnetic recording media.

引用

页码：3633 / 3635

页数：3

共 9 条

[1] TECHNOLOGY AND APPLICATIONS OF BROAD-BEAM ION SOURCES USED IN SPUTTERING .2. APPLICATIONS [J].