C-AXIS PREFERRED ORIENTATION OF LASER-ABLATED EPITAXIAL PBTIO3 FILMS AND THEIR ELECTRICAL-PROPERTIES

被引:44
作者
TABATA, H
MURATA, O
KAWAI, T
KAWAI, S
OKUYAMA, M
机构
[1] OSAKA UNIV,INST SCI & IND RES,IBARAKI,OSAKA 567,JAPAN
[2] OSAKA UNIV,FAC ENGN SCI,TOYONAKA,OSAKA 560,JAPAN
关键词
D O I
10.1063/1.111120
中图分类号
O59 [应用物理学];
学科分类号
摘要
Ferroelectric PbTiO3 epitaxial thin films have been formed on a base electrode of Pt(100)/MgO(100) using ArF excimer laser ablation. The x-ray diffraction patterns of these films show c-axis orientation with a rocking angle of 0.5 when the film is cooled faster than 75 degrees C/min after the deposition. The films exhibit clear and large ferroelectric hysteresis loops. The dielectric constant of the films is 130 and remnant polarization is 80 mu C/cm(2). The values are almost the same as those theoretically predicted. The pyroelectric coefficient of these films is 1000-1500 V/W at 10 Hz, even without poling treatment,
引用
收藏
页码:428 / 430
页数:3
相关论文
共 19 条
[1]  
CHIANG CK, 1990, MATER RES SOC S P, V225, P133
[2]   GROWTH AND PROPERTIES OF PIEZOELECTRIC AND FERROELECTRIC-FILMS [J].
FRANCOMBE, MH ;
KRISHNASWAMY, SV .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (03) :1382-1390
[3]   PREPARATION AND PROPERTIES OF LEAD ZIRCONATE-TITANATE THIN-FILMS [J].
IIJIMA, K ;
UEDA, I ;
KUGIMIYA, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (9B) :2149-2151
[4]   INFLUENCE OF LASER FLUENCE ON STRUCTURAL AND FERROELECTRIC PROPERTIES OF LEAD-ZIRCONATE-TITANATE THIN-FILMS PREPARED BY LASER ABLATION [J].
KIDOH, H ;
OGAWA, T ;
YASHIMA, H ;
MORIMOTO, A ;
SHIMIZU, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (9B) :2167-2169
[5]  
KOIJIMA M, 1982, 2ND P SENS S, P241
[6]  
MASTUBARA S, 1989, J APPL PHYS, V66, P5826
[7]   CONTROLLING THE CRYSTAL ORIENTATIONS OF LEAD TITANATE THIN-FILMS [J].
OGAWA, T ;
SENDA, A ;
KASANAMI, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (9B) :2145-2148
[8]   PREPARATION AND PROPERTIES OF (PB,LA)(ZR,TI)O3 THIN-FILMS BY METALORGANIC CHEMICAL VAPOR-DEPOSITION [J].
OKADA, M ;
TOMINAGA, K .
JOURNAL OF APPLIED PHYSICS, 1992, 71 (04) :1955-1959
[9]   EXCIMER LASER ABLATED BARIUM STRONTIUM-TITANATE THIN-FILMS FOR DYNAMIC RANDOM-ACCESS MEMORY APPLICATIONS [J].
ROY, D ;
KRUPANIDHI, SB .
APPLIED PHYSICS LETTERS, 1993, 62 (10) :1056-1058
[10]  
SAENGER KL, 1990, MATER RES SOC SYMP P, V200, P115, DOI 10.1557/PROC-200-115