C-AXIS PREFERRED ORIENTATION OF LASER-ABLATED EPITAXIAL PBTIO3 FILMS AND THEIR ELECTRICAL-PROPERTIES

被引:44
作者
TABATA, H
MURATA, O
KAWAI, T
KAWAI, S
OKUYAMA, M
机构
[1] OSAKA UNIV,INST SCI & IND RES,IBARAKI,OSAKA 567,JAPAN
[2] OSAKA UNIV,FAC ENGN SCI,TOYONAKA,OSAKA 560,JAPAN
关键词
D O I
10.1063/1.111120
中图分类号
O59 [应用物理学];
学科分类号
摘要
Ferroelectric PbTiO3 epitaxial thin films have been formed on a base electrode of Pt(100)/MgO(100) using ArF excimer laser ablation. The x-ray diffraction patterns of these films show c-axis orientation with a rocking angle of 0.5 when the film is cooled faster than 75 degrees C/min after the deposition. The films exhibit clear and large ferroelectric hysteresis loops. The dielectric constant of the films is 130 and remnant polarization is 80 mu C/cm(2). The values are almost the same as those theoretically predicted. The pyroelectric coefficient of these films is 1000-1500 V/W at 10 Hz, even without poling treatment,
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页码:428 / 430
页数:3
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