IMAGING HIGH-FREQUENCY DIELECTRIC-DISPERSION OF SURFACES AND THIN-FILMS BY HETERODYNE FORCE-DETECTED SCANNING MAXWELL-STRESS MICROSCOPY

被引:11
作者
YOKOYAMA, H
JEFFERY, MJ
机构
[1] Molecular Physics Section, Electrotechnical Laboratory, Tsukuba Ibaraki, 305
关键词
DIELECTRIC DISPERSION IMAGING; DYNAMIC ELECTRICAL PHENOMENA; HETERODYNE FORCE DETECTION; SCANNING MAXWELL-STRESS MICROSCOPY;
D O I
10.1016/0927-7757(94)02868-0
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The design and performance of the heterodyne force-detected scanning Maxwell-stress microscope (HFD-SMM), a new tool for the microscopic observation of dynamic electrical phenomena at surfaces, are described. The HFD-SMM utilizes the non-linearity of the electric Maxwell stress with respect to the field strength which serves as a frequency mixer to create a low frequency heterodyne beat force from high frequency held components so as to make them observable even with a slowly responding cantilever. Combined with the tip-surface distance control based on capacitive forces, the HFD-SMM allows reliable dielectric-dispersion imaging at arbitrarily high frequencies, while carrying out simultaneous non-contact imaging of surface potentials and topography as in the original SMM. Images with clear frequency-dispersion contrast are presented for metal, semiconductor and polymer surfaces.
引用
收藏
页码:359 / 373
页数:15
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