PREPARATION AND PROPERTIES OF DIFFERENT TYPES OF SPUTTERED MOS2 FILMS

被引：101

作者：

BUCK, V ^{[1
]}

机构：

[1] DFVLR,INST TECH PHYS,LUBRICANTS & TRIBOL BRANCH,D-7000 STUTTGART 80,FED REP GER

来源：

关键词：

D O I：

10.1016/0043-1648(87)90116-5

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

引用

页码：263 / 274

页数：12

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