A PRACTICAL DEPTH DISTRIBUTION FUNCTION FOR ANGLE-RESOLVED AUGER-PHOTOELECTRON SPECTROSCOPY

被引：13

作者：

DWYER, VM

机构：

[1] Department of Electronic and Electrical Engineering, Loughborough University of Technology, Loughborough

来源：

SURFACE SCIENCE | 1994年 / 310卷 / 1-3期

关键词：

D O I：

10.1016/0039-6028(94)91362-5

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

It is shown that, to a good approximation, over the range of energies (single scattering albedo, omega less than or similar to 0.5) and angles (take-off angle > 30-degrees) used in angle-resolved AES and XPS spectroscopy, the depth distribution function (DDF) is approximately exponential with decay length LAMBDA = lambda(i)(1 + lambda(i)/lambda(tr))-1/2, for inelastic mean free path (IMFP) lambda(i) and transport mean free path lambda(tr). As LAMBDA is also the length measured for the attenuation length experimentally (with either the overlayer technique or from backscatter spectra, equivalent to lambda(i) using an interpretation which neglects elastic effects), the CDP may be obtained by straightforward Laplace inversion using experimentally determined attenuation lengths. That is, the correct composition depth profile may be obtained from systematically ignoring elastic scattering.

引用

页码：L621 / L624

页数：4

共 10 条

[1] RECONSTRUCTION OF THE DEPTH PROFILE FROM ANGLE-RESOLVED AES XPS [J].