DEPOSITION OF SMOOTH TETRAHEDRAL AMORPHOUS-CARBON THIN-FILMS USING A CATHODIC ARC WITHOUT A MACROPARTICLE FILTER

被引：20

作者：

CHHOWALLA, M ^{[1
]}

WEILER, M ^{[1
]}

DAVIS, CA ^{[1
]}

KLEINSORGE, B ^{[1
]}

AMARATUNGA, GAJ ^{[1
]}

机构：

[1] UNIV KAISERSLAUTERN,FACHBEREICH PHYS,D-67653 KAISERSLAUTERN,GERMANY

来源：

APPLIED PHYSICS LETTERS | 1995年 / 67卷 / 07期

关键词：

D O I：

10.1063/1.114728

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

It is shown that for a cathode consisting of compressed graphite powder, the cathodic are discharge is confined within deep erosion holes and the macroparticle emission is greatly reduced. Electron energy loss spectroscopy and scanning electron microscopy show that smooth tetrahedral amorphous carbon films with up to 85+/-10% sp(3) bonding can be deposited without the use of magnetic filters. The new carbon are discharge process holds potential for deposition of smooth tetrahedral amorphous carbon films on large area substrates due to the elimination of the magnetic filtering stage. (C) 1995 American Institute of Physics.

引用

页码：894 / 896

页数：3

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