DETERMINATION OF THICKNESS AND OPTICAL-CONSTANTS OF THIN-FILMS FROM PHOTOMETRIC AND ELLIPSOMETRIC MEASUREMENTS

被引：37

作者：

ELIZALDE, E ^{[1
]}

FRIGERIO, JM ^{[1
]}

RIVORY, J ^{[1
]}

机构：

[1] UNIV PARIS 06, OPT SOLIDS LAB, F-75230 PARIS 05, FRANCE

来源：

关键词：

D O I：

10.1364/AO.25.004557

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：4557 / 4561

页数：5

共 23 条

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