ELECTRICAL-PROPERTIES OF (CASR)F2/GAAS(111)B INTERFACES GROWN BY MOLECULAR-BEAM EPITAXY - REALIZATION OF UNPINNING

被引:20
作者
WAHO, T [1 ]
SAEKI, H [1 ]
机构
[1] KEIO UNIV, DEPT ELECT ENGN, YOKOHAMA, KANAGAWA 223, JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1991年 / 30卷 / 02期
关键词
SURFACE STATE; FERMI LEVEL PINNING; MIS; C-V; ICTS; GAAS; CAF2; SRF2;
D O I
10.1143/JJAP.30.221
中图分类号
O59 [应用物理学];
学科分类号
摘要
Electrical properties of lattice-matched (CaSr)F2/GaAs(111)B interfaces grown by molecular beam epitaxy (MBE) are investigated. C-V and ICTS results are presented that clearly indicate for the first time that the GaAs surface level is unpinned in metal/fluoride/GaAs (MIS) structures. The surface potential can be moved toward the conduction band edge up to E(c) - 0.1 eV. The minimum interface state density is estimated to be around 1 x 10(11) eV-1 cm-2. In contrast, strong pinning is observed for MIS diodes using (100)-oriented substrates or lattice-mismatched fluorides. The realization of unpinning and accumulation is attributed to interface coherence and dangling bond termination. The present analysis demonstrates that pinning-free GaAs MIS structures can be successfully achieved if the interface is prepared properly.
引用
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页码:221 / 227
页数:7
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