GROWTH-MODE-SPECIFIC INTRINSIC STRESS OF THIN SILVER FILMS

被引：43

作者：

KOCH, R

WINAU, D

FUHRMANN, A

RIEDER, KH

机构：

[1] Institut F̈r Experimentalphysik, Freie Universität Berlin, 1000 Berlin 33

来源：

PHYSICAL REVIEW B | 1991年 / 44卷 / 07期

关键词：

D O I：

10.1103/PhysRevB.44.3369

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The growth and morphology of thin films are directly related to their intrinsic stress. In the system silver on mica (001) three different Vollmer-Weber-type growth modes were clearly distinguished by in situ intrinsic-stress measurements, using a very sensitive cantilever beam device. For epitaxial silver films, a stress contribution due to the formation of single crystalline domain walls is observed.

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页码：3369 / 3372

页数：4

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