SILICON MONOXIDE THIN-FILMS

被引:51
作者
RAIDER, SI
FLITSCH, R
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
[2] IBM CORP,DIV SYST PROD,HOPEWELL JUNCTION,NY 12533
关键词
D O I
10.1149/1.2132685
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
收藏
页码:1754 / 1757
页数:4
相关论文
共 19 条
  • [1] MATRIX ISOLATION STUDIES OF GROUP-IV OXIDES .I. INFRARED SPECTRA AND STRUCTURES OF SIO, SI2O2, AND SI3O3
    ANDERSON, JS
    OGDEN, JS
    [J]. JOURNAL OF CHEMICAL PHYSICS, 1969, 51 (10) : 4189 - &
  • [2] Bonhoeffer KF, 1928, Z PHYS CHEM-STOCH VE, V131, P363
  • [3] BREWER W, 1957, J PHYS CHEM SOLIDS, V2, P286
  • [4] ESCA STUDY OF OXIDE AT SI-SIO2 INTERFACE
    CLARKE, RA
    TAPPING, RL
    HOPPER, MA
    YOUNG, L
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (10) : 1347 - 1350
  • [5] STRUCTURE OF SILICON OXIDE FILMS
    COLEMAN, MV
    THOMAS, DJD
    [J]. PHYSICA STATUS SOLIDI, 1967, 22 (02): : 593 - &
  • [6] ELECTRON MEAN ESCAPE DEPTHS FROM X-RAY PHOTOELECTRON-SPECTRA OF THERMALLY OXIDIZED SILICON DIOXIDE FILMS ON SILICON
    FLITSCH, R
    RAIDER, SI
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01): : 305 - 308
  • [7] HAAS G, 1950, J AM CERAM SOC, V33, P353
  • [8] HASTIE JW, 1969, INORG CHIM ACTA, V3, P601
  • [9] HOLLINGER G, 1974, TETRAHEDRALLY BONDED, P102
  • [10] PHASE SEPARATION IN SILICON OXIDES AS SEEN BY AUGER-ELECTRON SPECTROSCOPY
    JOHANNESSEN, JS
    SPICER, WE
    STRAUSSER, YE
    [J]. APPLIED PHYSICS LETTERS, 1975, 27 (08) : 452 - 454