ELECTRON-SPIN RESONANCE OF ULTRAHIGH-VACUUM EVAPORATED AMORPHOUS SILICON - INSITU AND EXSITU STUDIES

被引:149
作者
THOMAS, PA
BRODSKY, MH
KAPLAN, D
LEPINE, D
机构
[1] IBM CORP, THOMAS J WATSON RES CTR, YORKTOWN HTS, NY 10598 USA
[2] THOMSON CSF, CENT RES LAB, F-91401 ORSAY, FRANCE
[3] ECOLE POLYTECH, PHYS MAT CONDENSEE LAB, F-91120 PALAISEAU, FRANCE
关键词
D O I
10.1103/PhysRevB.18.3059
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:3059 / 3073
页数:15
相关论文
共 59 条
  • [1] ABRAGAM A, 1962, PRINCIPLES NUCLEAR M, P126
  • [2] AGARWAL SC, 1973, PHYS REV B, V7, P685
  • [3] ARIZUMI T, 1974, 5TH P INT C AM LIQ S, P1065
  • [4] Bahl S. K., 1974, 5th International Conference on amorphous and liquid semiconductors, Vol.I, P69
  • [5] PROPERTIES OF AMORPHOUS SILICON FILMS - DEPENDENCE ON DEPOSITION RATE
    BAHL, SK
    BHAGAT, SM
    GLOSSER, R
    [J]. SOLID STATE COMMUNICATIONS, 1973, 13 (08) : 1159 - 1163
  • [6] Barna A., 1974, 5th International Conference on amorphous and liquid semiconductors, Vol.I, P109
  • [7] BLUZER N, 1974, 5TH P INT C AM LIQ S, P1209
  • [8] Brodsky A.H., 1972, J NONCRYST SOLIDES, V8, P739, DOI [10.1016/0022-3093(72)90221-9, DOI 10.1016/0022-3093(72)90221-9]
  • [9] RELATIONS BETWEEN STRUCTURE AND OPTICAL AND ELECTRICAL PROPERTIES OF AMORPHOUS SI AND GE FILMS
    BRODSKY, MH
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1971, 8 (01): : 125 - &
  • [10] ELECTRON SPIN RESONANCE IN AMORPHOUS SILICON, GERMANIUM, AND SILICON CARBIDE
    BRODSKY, MH
    TITLE, RS
    [J]. PHYSICAL REVIEW LETTERS, 1969, 23 (11) : 581 - &