ELECTRICALLY ACTIVE DEFECTS IN LIQUID-PHASE EPITAXIAL INTERFACES IN THE IN0.53GA0.47AS/INP SYSTEM

被引:11
作者
WHITNEY, PS
FONSTAD, CG
机构
[1] MIT,DEPT MAT SCI & ENGN,CAMBRIDGE,MA 02139
[2] MIT,CTR MAT SCI & ENGN,CAMBRIDGE,MA 02139
[3] MIT,DEPT ELECT ENGN & COMP SCI,CAMBRIDGE,MA 02139
关键词
CRYSTALS - Epitaxial Growth - ELECTRIC PROPERTIES - SEMICONDUCTOR DEVICES - Heterojunctions;
D O I
10.1016/0022-0248(87)90011-X
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The electrical properties of liquid phase epitaxial interfaces in the lattice-matched In//0//. //5//3Ga//0//. //4//7As/InP system were studied using C-V profiling and capacitance transient spectroscopy. The measurements indicate a high density of acceptor-like electron traps about 0. 10 ev below the conduction band in a highly localized region in the immediate vicinity of LPE n-In//0//. //5//3Ga//0//. //4//7As/N-InP isotype heterojunctions. The complete absence of these traps in the interface between two successively grown InP layers, and between two successively grown In//0//. //5//3Ga//0//. //4//7As layers indicates that the defects are formed during the initial stages of heteroepitaxy. Possible origins of this elecron trap are discussed.
引用
收藏
页码:219 / 232
页数:14
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