ORIGIN OF THE DIFFERENCE IN THE MECHANICAL STRENGTHS OF CZOCHRALSKI-GROWN SILICON AND FLOAT-ZONE-GROWN SILICON

被引：75

作者：

SUMINO, K

HARADA, H

YONENAGA, I

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1980年 / 19卷 / 01期

关键词：

D O I：

10.1143/JJAP.19.L49

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L49 / L52

页数：4

共 10 条

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