SINGLE-CRYSTAL SILICON-ON-OXIDE BY A SCANNING CW LASER-INDUCED LATERAL SEEDING PROCESS

被引：70

作者：

LAM, HW

PINIZZOTTO, RF

TASCH, AF

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1981年 / 128卷 / 09期

关键词：

D O I：

10.1149/1.2127779

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

收藏

页码：1981 / 1986

页数：6

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