COLUMNAR GRAIN-STRUCTURE IN THICK SPUTTERED NICKEL

被引:12
作者
PATTEN, JW
机构
关键词
D O I
10.1016/0040-6090(81)90397-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:205 / 211
页数:7
相关论文
共 20 条
  • [1] BOONE DH, 1974, J VAC SCI TECHNOL, V11
  • [2] BUNSHAH RF, 1973, METALL T, V4
  • [3] BUNSHAH RF, 1974, J VAC SCI TECHNOL, V11
  • [4] MICROSTRUCTURAL ANALYSIS AND TENSILE PROPERTIES OF THICK COPPER AND NICKEL SPUTTER DEPOSITS
    DAHLGREN, SD
    NICHOLSON, WL
    MERZ, MD
    BOLLMANN, W
    DEVLIN, JF
    WANG, DR
    [J]. THIN SOLID FILMS, 1977, 40 (JAN) : 345 - 353
  • [5] COLUMNAR MICROSTRUCTURE IN VAPOR-DEPOSITED THIN-FILMS
    DIRKS, AG
    LEAMY, HJ
    [J]. THIN SOLID FILMS, 1977, 47 (03) : 219 - 233
  • [6] FLANDERS DC, 1978, APPL PHYS LETT, V32, P10
  • [7] CRYSTALLOGRAPHIC ORIENTATION OF SILICON ON AN AMORPHOUS SUBSTRATE USING AN ARTIFICIAL SURFACE-RELIEF GRATING AND LASER CRYSTALLIZATION
    GEIS, MW
    FLANDERS, DC
    SMITH, HI
    [J]. APPLIED PHYSICS LETTERS, 1979, 35 (01) : 71 - 74
  • [8] HECHT RJ, 1975, J VAC SCI TECHNOL, V12
  • [9] Movchan B. A., 1969, Fizika Metallov i Metallovedenie, V28, P653
  • [10] EFFECTS OF DEPOSITION TEMPERATURE AND SUBSTRATE BIAS ON ORIENTATION AND HARDNESS OF THICK SPUTTER DEPOSITED BERYLLIUM FOILS
    PATTEN, JW
    MCCLANAHAN, ED
    [J]. JOURNAL OF THE LESS-COMMON METALS, 1973, 30 (03): : 351 - 359