A COMPARATIVE-STUDY OF THE DIFFUSION BARRIER PROPERTIES OF TIN AND ZRN

被引:89
作者
OSTLING, M
NYGREN, S
PETERSSON, CS
NORSTROM, H
BUCHTA, R
BLOM, HO
BERG, S
机构
[1] UNIV UPPSALA,INST TECHNOL,S-75121 UPPSALA,SWEDEN
[2] INST MICROWAVE TECHNOL,S-10044 STOCKHOLM,SWEDEN
关键词
D O I
10.1016/0040-6090(86)90254-3
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
13
引用
收藏
页码:81 / 88
页数:8
相关论文
共 13 条
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