CHEMISORPTION OF H2O ON THE SI(111) 7 X 7 SURFACES

被引:22
作者
FUJIWARA, K
OGATA, H
机构
[1] Central Research Laboratory, Mitsubishi Electric Corporation, Amagasaki, Hyogo
关键词
D O I
10.1016/0039-6028(79)90449-7
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Chemisorption of H2O on the thermally cleaned Si(111) 7 × 7 surfaces has been studied by ultraviolet photoemission, energy loss and Auger electron spectroscopies. We provide direct experimental evidence that, at room temperature, the molecules non-dissociatively adsorb in a single state. It is also found that, with increasing annealing temperature up to ∼1500 K, the reaction processes proceed in three steps: molecular adsorption, dissociation and hydrogen desorption and oxygen desorption. © 1979.
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页码:700 / 705
页数:6
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