THE PREPARATION OF HYDROGENATED AMORPHOUS-SILICON BY PLASMA-ENHANCED REACTIVE EVAPORATION

[21] OXYGEN-BONDING ENVIRONMENTS IN GLOW-DISCHARGE DEPOSITED AMORPHOUS SILICON-HYDROGEN ALLOY-FILMS [J]. PHYSICAL REVIEW B, 1983, 28 (06): : 3225 - 3233

[22] CHEMICAL EFFECTS ON THE FREQUENCIES OF SI-H VIBRATIONS IN AMORPHOUS SOLIDS [J]. SOLID STATE COMMUNICATIONS, 1979, 29 (08) : 571 - 576

[23] STUDY ON IMPURITY DIFFUSION IN THE GLOW-DISCHARGED HYDROGENATED AMORPHOUS-SILICON [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1983, 59-6 (DEC) : 517 - 520

[24] MCLLRAITH AH, 1972, J VAC SCI TECHNOL, V9, P209

[25] SOME PROPERTIES OF EVAPORATED AMORPHOUS SILICON MADE WITH ATOMIC-HYDROGEN [J]. JOURNAL OF APPLIED PHYSICS, 1978, 49 (12) : 6192 - 6193

[26] MOTT NF, 1979, ELECTRONIC PROCESSES, P46

[27] Olesinski R. W., 1984, B ALLOY PHASE DIAGRA, V5, P486, DOI [DOI 10.1007/BF02872902, 10.1007/BF02872902]

[28] OSHAWA M, 1985, J NONCRYST SOLIDS, V77, P401

[29] PANKOVE JI, 1984, HYDROGENATED AMORP D, V21

[30] PAULING L, 1975, CHEMISTRY, P740

[21] OXYGEN-BONDING ENVIRONMENTS IN GLOW-DISCHARGE DEPOSITED AMORPHOUS SILICON-HYDROGEN ALLOY-FILMS [J]. PHYSICAL REVIEW B, 1983, 28 (06): : 3225 - 3233

[22] CHEMICAL EFFECTS ON THE FREQUENCIES OF SI-H VIBRATIONS IN AMORPHOUS SOLIDS [J]. SOLID STATE COMMUNICATIONS, 1979, 29 (08) : 571 - 576

[23] STUDY ON IMPURITY DIFFUSION IN THE GLOW-DISCHARGED HYDROGENATED AMORPHOUS-SILICON [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1983, 59-6 (DEC) : 517 - 520

[24] MCLLRAITH AH, 1972, J VAC SCI TECHNOL, V9, P209

[25] SOME PROPERTIES OF EVAPORATED AMORPHOUS SILICON MADE WITH ATOMIC-HYDROGEN [J]. JOURNAL OF APPLIED PHYSICS, 1978, 49 (12) : 6192 - 6193

[26] MOTT NF, 1979, ELECTRONIC PROCESSES, P46

[27] Olesinski R. W., 1984, B ALLOY PHASE DIAGRA, V5, P486, DOI [DOI 10.1007/BF02872902, 10.1007/BF02872902]

[28] OSHAWA M, 1985, J NONCRYST SOLIDS, V77, P401

[29] PANKOVE JI, 1984, HYDROGENATED AMORP D, V21

[30] PAULING L, 1975, CHEMISTRY, P740