ELLIPSOMETRY IN THIN-FILM ANALYSIS

被引：61

作者：

THEETEN, JB ^{[1
]}

ASPNES, DE ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

ANNUAL REVIEW OF MATERIALS SCIENCE | 1981年 / 11卷

关键词：

D O I：

10.1146/annurev.ms.11.080181.000525

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：97 / 122

页数：26

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