THE STRUCTURE AND COMPOSITION OF LAYERS OBTAINED BY ION-BEAM MIXING IN THE TI/SI AND CO/SI SYSTEMS

被引：11

作者：

MAEX, K

DEKEERSMAECKER, RF

VANROSSUM, M

VANDERWEG, WF

KROOSHOF, G

机构：

[1] STATE UNIV UTRECHT, DEPT TECH PHYS, 3508 TA UTRECHT, NETHERLANDS

[2] IMEC LAB, B-3030 LEUVEN, BELGIUM

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 19-20卷

关键词：

D O I：

10.1016/S0168-583X(87)80146-5

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：731 / 736

页数：6

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