CURRENT IMAGING TUNNELING SPECTROSCOPY OF METALLIC DEPOSITS ON SILICON

被引:16
作者
ASENJO, A
GOMEZRODRIGUEZ, JM
BARO, AM
机构
[1] Departamento de Física de la Materia Condensada, C-III, Universidad Autónoma de Madrid
关键词
D O I
10.1016/0304-3991(92)90381-S
中图分类号
TH742 [显微镜];
学科分类号
摘要
An STM/SEM combined system has been used to perform CITS (Current imaging tunneling spectroscopy) measurements of metallic clusters deposited on silicon. Following a well known method, the deposits were created with STM by applying voltage pulses between tip and sample under a W(CO)6 atmosphere. Spectroscopic plots were then recorded on every point of the sample topography. Apparent barrier-height maps were also measured. Both barrier height and spectroscopic data revealed a different behaviour between clusters and silicon. I-V curves showed metal-like features on the deposits while a typical semiconducting character was found on the substrate.
引用
收藏
页码:933 / 939
页数:7
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