共 16 条
- [1] OPTICAL-PROPERTIES OF ALUMINUM NITRIDE PREPARED BY CHEMICAL AND PLASMACHEMICAL VAPOR-DEPOSITION [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1977, 39 (01): : 173 - 181
- [4] Duffy M. T., 1973, Journal of Electronic Materials, V2, P359, DOI 10.1007/BF02666163
- [5] Interrante L. V., 1986, MATER RES SOC S P, V73, P359
- [6] KUBIAK CJG, 1985, MATER RES SOC S P, V47, P75
- [7] ALN SUBSTRATES WITH HIGH THERMAL-CONDUCTIVITY [J]. IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY, 1985, 8 (02): : 247 - 252
- [8] LI XJ, 1986, THIN SOLID FILMS, V139, P261, DOI 10.1016/0040-6090(86)90056-8
- [9] PREPARATION AND ELECTRICAL PROPERTIES OF AL-ALN-SI STRUCTURES [J]. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1972, 11 (02): : 631 - +