PREPARATION AND PROPERTIES OF ALUMINUM NITRIDE FILMS USING AN ORGANOMETALLIC PRECURSOR

被引:114
作者
INTERRANTE, LV [1 ]
LEE, W [1 ]
MCCONNELL, M [1 ]
LEWIS, N [1 ]
HALL, E [1 ]
机构
[1] GE,CORP RES & DEV,MAT CHARACTERIZAT & ENGN SUPPORT OPERAT,SCHENECTADY,NY 12301
关键词
D O I
10.1149/1.2096657
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
收藏
页码:472 / 478
页数:7
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