KINETIC PROCESSES IN EPITAXY OF GAXIN1-XAS ON INP(100) BY HYDRIDE VAPOR-PHASE EPITAXY

被引：2

作者：

CADORET, M

CHAPUT, L

BANVILLET, H

PORTE, A

PARISET, C

CADORET, R

机构：

[1] Laboratoire de Physique des Milieux Condensés, URA CNRS D0796, Université Blaise Pascal-Clermont II

来源：

THIN SOLID FILMS | 1990年 / 192卷 / 02期

关键词：

D O I：

10.1016/0040-6090(90)90078-R

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The growth of matched GaxIn1-xAs layers on InP(100) substrates using the hydride method is studied. This paper collects all detected processes that take place in the reactor: surface reactions on the substrate, non-equilibrium reactions in the vapour phase and diffusion in the vapour phase. The experimental results are consistent with the whole model. © 1990.

引用

页码：343 / 350

页数：8

共 14 条

[1] MASS-SPECTROMETRIC AND THERMODYNAMIC STUDIES OF CVD OF SOME III-V COMPOUNDS
BAN, VS
[J]. JOURNAL OF CRYSTAL GROWTH, 1972, 17 (DEC) : 19 - &
[2] BUCKLEY DN, 1988, J ELECTRON MATER, V17, P1
[3] APPROACH OF THE INTERPLAY BETWEEN KINETICS AND DIFFUSION IN HOT WALL REACTORS USED IN VPE OF III-V-COMPOUNDS
CADORET, R
LAPORTE, JL
HARROUS, M
[J]. MATERIALS RESEARCH BULLETIN, 1986, 21 (10) : 1259 - 1267
[4] THEORETICAL TREATMENT OF GAAS GROWTH BY VAPOR-PHASE TRANSPORT FOR (001) ORIENTATION
CADORET, R
CADORET, M
[J]. JOURNAL OF CRYSTAL GROWTH, 1975, 31 (DEC) : 142 - 146
[5] INTERACTION KINETICS OF AS2 AND GA ON [100] GAAS SURFACES
FOXON, CT
JOYCE, BA
[J]. SURFACE SCIENCE, 1977, 64 (01) : 293 - 304
[6] INTERACTION KINETICS OF AS4 AND GA ON [100] GAAS SURFACES USING A MODULATED MOLECULAR-BEAM TECHNIQUE
FOXON, CT
JOYCE, BA
[J]. SURFACE SCIENCE, 1975, 50 (02) : 434 - 450
[7] EVALUATION OF SURFACE KINETIC DATA BY TRANSFORM ANALYSIS OF MODULATED MOLECULAR-BEAM MEASUREMENTS
FOXON, CT
BOUDRY, MR
JOYCE, BA
[J]. SURFACE SCIENCE, 1974, 44 (01) : 69 - 92
[8] EFFECT OF PHOSPHINE DECOMPOSITION ON THE GROWTH AND SUBSTRATE HEATING OF (100)INP IN THE HYDRIDE METHOD
HARROUS, M
LAPORTE, JL
CADORET, M
PARISET, C
CADORET, R
[J]. JOURNAL OF CRYSTAL GROWTH, 1987, 83 (02) : 279 - 285
[9] JONES KA, 1984, J CRYST GROWTH, V70, P127, DOI 10.1016/0022-0248(84)90257-4
[10] JONES KA, 1982, J CRYST GROWTH, V60, P313, DOI 10.1016/0022-0248(82)90104-X

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