MAGNETOSTRICTION IN FETAN THIN-FILMS

被引:12
作者
CATES, JC
ALEXANDER, C
HAFTEK, E
BARNARD, JA
机构
[1] UNIV ALABAMA,DEPT MET & MAT ENGN,TUSCALOOSA,AL 35487
[2] UNIV ALABAMA,CTR MAT INFORMAT TECHNOL,TUSCALOOSA,AL 35487
关键词
9;
D O I
10.1109/20.280885
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Magnetostriction has been studied in FeTaN single layer thin films deposited by high power density, high growth rate, dc magnetron sputtering. Magnetostriction was found to increase linearly with the nitrogen content of the films, passing from negative to positive with increasing nitrogen content. Thinner films exhibited larger positive magnetostriction than thicker films deposited at the same nitrogen flow rate. Film stress was found to be tensile in as-deposited films grown at zero nitrogen pressure. As the nitrogen content in the films increased, the film stress changed from tensile to compressive and increased in magnitude while annealing at 300-degrees-C reduced the magnitude of film stress without affecting magnetostriction. Stress anisotropy was found to reach a minimum at low nitrogen flow rate, and stripe domain formation accompanied large stress anisotropy at high nitrogen flow rates.
引用
收藏
页码:3105 / 3107
页数:3
相关论文
共 9 条
[1]   SOFT MAGNETISM OF HIGH-NITROGEN-CONCENTRATION FETAN FILMS [J].
ISHIWATA, N ;
WAKABAYASHI, C ;
URAI, H .
JOURNAL OF APPLIED PHYSICS, 1991, 69 (08) :5616-5618
[2]  
ISHIWATA N, 1992, J MAGN MAG MATER, V104, P185
[3]  
Nago K., 1992, IEEE Translation Journal on Magnetics in Japan, V7, P119, DOI 10.1109/TJMJ.1992.4565343
[4]  
NAGO K, 1991, J MAGN SOC JPN, V15, P365
[5]  
NAKANISHI K, 1991, J MAGN SOC JPN, V15, P371
[6]  
QIU G, IN PRESS J APPL PHYS
[7]   A NEW HIGH-PRECISION OPTICAL TECHNIQUE TO MEASURE MAGNETOSTRICTION OF A THIN MAGNETIC-FILM DEPOSITED ON A SUBSTRATE [J].
TAM, AC ;
SCHROEDER, H .
IEEE TRANSACTIONS ON MAGNETICS, 1989, 25 (03) :2629-2638
[8]  
WANG S, 1990, J APPL PHYS, V69, P5134
[9]   MAGNETIC-PROPERTIES OF FE-TA-N-O FILM WITH HIGH SATURATION FLUX-DENSITY [J].
WATANABE, Y ;
OURA, H ;
ONOZATO, N .
IEEE TRANSACTIONS ON MAGNETICS, 1990, 26 (05) :1500-1502