NITRIDATION-ENHANCED CONDUCTIVITY BEHAVIOR AND CURRENT TRANSPORT MECHANISM IN THIN THERMALLY NITRIDED SIO2

被引：80

作者：

CHENG, XR

CHENG, YC

LIU, BY

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 03期

关键词：

D O I：

10.1063/1.340072

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：797 / 802

页数：6

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