CONTACT RESISTIVITY OF SOME MAGNESIUM SILICON AND MAGNESIUM SILICIDE SILICON STRUCTURES

被引：35

作者：

JANEGA, PL

MCCAFFREY, J

LANDHEER, D

BUCHANAN, M

DENHOFF, M

MITCHEL, D

机构：

来源：

APPLIED PHYSICS LETTERS | 1988年 / 53卷 / 21期

关键词：

D O I：

10.1063/1.100496

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：2056 / 2058

页数：3

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