AN ALTERED LAYER MODEL FOR ION ASSISTED DEPOSITION UNDER NET GROWTH-CONDITIONS

被引：9

作者：

CARTER, G

KATARDJIEV, IV

NOBES, MJ

机构：

来源：

VACUUM | 1989年 / 39卷 / 06期

关键词：

D O I：

10.1016/0042-207X(89)90636-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：571 / 578

页数：8

共 20 条

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[10]

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